https://ogma.newcastle.edu.au/vital/access/ /manager/Index en-au 5 https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:7656 Sat 24 Mar 2018 08:35:59 AEDT ]]> https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:13391 Sat 24 Mar 2018 08:16:22 AEDT ]]> https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:19443 Sat 24 Mar 2018 08:02:26 AEDT ]]> https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:19367 -1 and exhibited no dynamics up to the 1.2 kHz bandwidth of the MEMS device it was implemented in. The electrostatic drive in this technique is used for both actuation and sensing. This effectively increases the transduction efficiency of both the actuator and sensor as more space on the die can be dedicated to the one drive. Additionally, the scheme allows for one terminal of the drive to be grounded. Thus, this scheme can be used on MEMS devices with more than one drive connected to a common mechanical structure which is electrically grounded.]]> Sat 24 Mar 2018 07:52:02 AEDT ]]>